Vacuum Coating
MBRAUN designs coating systems for a variety of thin film applications with a broad range of options and customized solutions. Deposition systems are individually designed for organic electronics and related fields. Based on a large set of established components and years of experience of our experts, every system is customized to the unique requirements and individual needs of the customer.
The vacuum technology centre team focuses on technologies for vacuum-based deposition processes, mainly physical vapour deposition, for the surface treatment or modification of materials. Our products include deposition sources for thin film deposition, components for vacuum systems, complete high vacuum (HV) and ultra-high vacuum (UHV) deposition systems and a variety of accessories.
MINIvap
The MINIvap is a high quality economic research solution with a compact design which includes all essential features for high-quality functional coatings. The MINIvap incorporates a standard configuration, making it the perfect entry model for many research groups who have decided to take the first steps in exploring vacuum coating technology.
Can be integrated in existing MBRAUN gloveboxes (through antechamber)
- For substrates up to 50 x 50 mm wafers
- Compact design
- Economic solution
- Short delivery time
- Fast and easy installation
- Easy retrofit in existing gloveboxes
PROvap
- Glovebox integrated system
- Compact and cost-effective solution
- Easy configuration design
- Co-deposition
- Uniformity up to +/-3 % (with specific geometry design up to +/1 %)
- Two standard-sizes: PROvap 4G and PROvap 5G
- Up to 8 deposition sources possible
- Substrate size up to 100x100 mm or diam. 100 mm (4”) for PROvap 4G
- Substrate size up to 150x150 mm or diam. 150 mm (6”) for PROvap 5G
UNIvap
The UNIvap is a research and development tool for thin film deposition under vacuum conditions. The rectangular shaped chamber offers additional space for additional sources and optional upgrades compared to the MINIvap. The UNIvap is the perfect model for many research groups who have decided to take the next steps in exploring vacuum coating technology.
- Standalone system
- Compact and cost-effective solution
- Easy configuration design
- Co-deposition is possible
- Uniformity up to +/-3 % (with specific geometry design up to +/1 %)
- Two standard-sizes: UNIvap 4S and UNIvap 5S
- Up to 8 deposition sources possible
- Substrate size up to 100x100 mm or diam. 100 mm (4”) for UNIvap 4S
- Substrate size up to 150x150 mm or diam. 150 mm (6”) for UNIvap 5S
OPTIvap
The OPTIvap series is the current high-end solution in CreaPhys's deposition tool series. Designed for the requirements of specialized research up to pilot scale production, these tools find frequent use in industrial laboratories and state-of-the-art Universities throughout the world.
- Flexible, modular system
- Stand-alone (S) or glovebox integrated (G)
- Building block for cluster tool
- Multi-substrate & multi-mask processes
- Standard uniformity: +/- 3 % (with specific geometry design up to +/1 %)
- Substrate size up to 150x150 mm or diam. 150 mm (6“) for OPTIvap 4
- Substrate size up to 200x200 mm or diam. 280 mm (8“) for OPTIvap 6
Applications:
- Complex multilayer devices (OLED,OPV)
- Optical layers
- Semiconductor, PV
PEROvap
MBRAUN offers specially designed feature add-ons for its existing vacuum deposition systems along with a patent process to develop and fabricate high efficiency perovskite solar cells with higher stability and greater efficiency. The PEROvap setup offers many special upgrades to the existing OPTIvap platforms which is designed to handle special materials in perovskite research.
Specially designed for Perovskites
- Ideal tool for efficient R&D
- Special system design
- Special precursor source
- High stability at low temperature
- Stable and defined deposition process
- High vacuum conditions
- Low cross-talk
- High repeatability
- Material compatibility for a very long lifetime
- Patent pending
